Laser Scanning Microscope
(Optical Profilometry)
Non-contact 2D/3D surface measurement for micron-scale devices—quantifies roughness, step height, taper, and edge quality to close the loop between fabrication and metrology.
Design → Fabricate → Measure (2D/3D) → Analyze → Iterate → Document
What this enables
Confident qualification of edge quality, taper, and sidewalls
Step-height and roughness verification (Ra/Rq/Rz, Sa/Sq)
Dimensional checks on vias, channels, and micro-features
Process feedback to improve laser/lamination recipes
Traceable reports for QA, SPC, and client validation
Measurement capabilities (high level)
Non-contact optical profilometry with high vertical sensitivity
2D line profiles + full 3D height maps (exportable)
Stitching for larger fields of view / whole-device maps
Fiducial-based positioning for repeatable locations
Export of CSV/OBJ/point-cloud data for downstream analysis
Software & workflow
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Autofocus & height scanning for clean peaks/valleys capture
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Area stitch/mosaic with overlap blending and drift handling
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Multi-ROI recipes (measure the same features across coupons)
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Roughness suite: Ra, Rq, Rz, Sa, Sq, PSD/frequency options
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Profile tools: step height, slope, radius, burr/undercut flags
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Report builder: images, 3D maps, profiles, tables, pass/fail
Spec highlights
| Vertical (Z) resolution | 10 nm display resolution (VK-X1050) | Z data range | Height data acquisition: 700,000 steps |
|---|---|---|---|
| Lateral (XY) resolution | Objective-dependent | Field of view | ~11 µm to 7,398 µm (min→max) |
| Laser / wavelength | Red semiconductor laser, 661 nm (VK-X1050) | Frame rate (measurement) | 4–125 Hz (up to 7,900 Hz top speed) |
| Repeatability (σ) | Laser confocal: 20×: 40 nm; 50×: 20 nm | Repeatability (3σ) | Laser confocal: 20×: 100 nm; 50×: 50 nm |
| Measurement accuracy | 0.2 + L/100 µm or less (L = measuring length) | Dynamic range | 16-bit |
| Optical system | Pinhole confocal & focus variation | Scanning / stitching | Automatic scan; supports stitched measurement |
| Autofocus / exposure | Auto upper/lower limit, high-speed light intensity optimization (AAGII) | Low-reflectivity aid | Double Scan (poor reflection supplement) |
| Stage travel (manual) | 70 × 70 mm | Stage travel (motorized) | 100 × 100 mm (VK-D1 / VK-D3) |
| Observation outputs | High-res color CMOS image; 16-bit laser color confocal | Laser class | Class 2 (IEC 60825-1; FDA CDRH 1040.10) |
Measurement Case: Edge Quality & Step Height
Objective: quantify edge quality and step height on laser-processed polyimide. We capture a 3D height map, extract line profiles at key ROIs, and report roughness and geometry metrics.
| ROI | Step height (µm) | Edge slope (°) | Ra (µm) | Rq (µm) | Rz (µm) | Notes |
|---|---|---|---|---|---|---|
| Edge A | Burr/HAZ remarks | |||||
| Edge B | ||||||
| Channel C |
- 3D map (image + raw data), 2D profiles (PNG/CSV)
- Metrics table (Ra/Rq/Rz, step height, slopes), pass/fail flags
- Narrative summary with measurement setup and locations
Ready to verify your device surface and edge quality?
We’ll capture 3D maps, profiles, and metrics that de-risk your next fabrication step.