Nikon Inspection Microscopes
(High-Magnification Optical QA)
High-magnification inspection for build quality, geometry, and defects—flexible illumination and measurement tooling for fast go/no-go checks and dimensional reviews at the micro-scale.
Inspect → Measure → Analyze → Document → Improve
What this enables
Fast go/no-go checks on features, edges, vias, traces, channels
Dimensional verification (diameter, width/spacing, runout) with calibrated overlays
Defect detection (burrs, chips, residue, particles, delamination)
Assembly checks (layer registration, adhesive spread, bond lines)
Traceable photo documentation for QA and client reports
Hardware highlights
Wide range of objectives for micro- to macro-fields of view
Coaxial/epi, ring, and oblique illumination for edge/surface contrast
Tilt/rotate staging to reveal sidewalls and complex features
Measurement reticles & digital overlays for quick metrology
Camera coupling for capture, sharing, and annotation
Software & workflow
Scale calibration with stage micrometer → accurate µm per pixel
Illumination tuning (coaxial vs ring vs oblique) to surface/edge goals
Checklists & defect taxonomy (burr, chip, smear, void, particulate)
Batch capture: wide → zoom → detail (annotated)
Deliverables: annotated images, quick dimension tables, pass/fail notes
Cross-link to High-Speed Camera page for motion studies using the same Nikon optics
Spec highlights
| Series / units | Nikon MM-400N (2 units) | Z-axis motion | 1× manual (dual-side coarse/fine); 1× motorized (max 10 mm/s) |
|---|---|---|---|
| Z-axis readout | Built-in Z linear scale on L/LM variants | Focusing Aid | Split-prism FA for precise Z focus (with LV-U EPI FA) |
| Max sample height | 150 mm (MM-400) | Dimensions / weight | ≈300 W × 567 D × 638 H mm; ~50 kg (excl. stage/eyepiece) |
| Illumination (diascopic) | White LED & Green LED (selectable) | Illumination (episcopic) | Universal EPI; FA variant available |
| Objectives (MM-type) | 1×, 3×, 5×, 10×, 20×, 50×, 100× | Optical heads | Trinocular / FA Trinocular / Variable-magnification |
| Stage options | PS 6×4B, PS 4×4B, PS 2×2B (MM-400) | Typical stroke | PS 6×4B: 150 × 100 mm (others per spec) |
| Accuracy (X/Y) | 2.0 + L/50 µm (main body) | With rotating table | 2.5 + L/50 µm (L in mm) |
| Data / display | SC2-E1 / SC3-E1 counters; DP-E1A data processor | Software | E-MAX V3 measurement & Excel output |
| Camera integration | LV-TV tube + C-mount adapter (for video capture) | Observation modes | EPI BF/DF/DIC (with LV-U EPI modules); diascopic BF LED |
Inspection Case: Micro-Aperture & Trace Quality
Objective: verify aperture diameter, edge integrity, and trace width/spacing on a laminated micro-device. We calibrated scale with a stage micrometer, tuned illumination for edge contrast, and captured annotated images for QA.
| Feature | Target (µm) | Measured (µm) | Δ (µm) | Notes / Defects |
|---|---|---|---|---|
| Aperture Ø | Edge burr / chip / clean | |||
| Trace width | Uniformity along run | |||
| Trace spacing | Nearest-neighbor variation | |||
| Particle count | — | — | Foreign matter in ROI |
- Annotated images (wide + zoom) with measurement overlays
- Measurement table (CSV) and pass/fail checklist
- Short narrative: setup, calibration, illumination, conclusions
Want fast, trustworthy optical QA?
We’ll capture calibrated images, verify dimensions, and document results your team can rely on.